ION SOURCE, ION INJECTION DEVICE AND ION SOURCE OPERATION METHOD

Title:

ION SOURCE, ION INJECTION DEVICE AND ION SOURCE OPERATION METHOD

Document Type and Number:

WIPO Patent Application WO/2019/054111

Kind Code:

A1

Abstract:

The present invention provides a technique for suppressing an abnormal electric discharge inside an ion generation container from an ion source, which is caused by an insulation film originating from by-products when an ionization gas and an ion source material are reacted to generate ions. This ion source comprises: a vacuum chamber (10A) having a cooling mechanism; an ion generation container (11) provided inside the vacuum chamber (10A), wherein the ionization gas and the ion source material are reacted to generate the ions; an extraction electrode (15) provided inside the vacuum chamber (10A), for extracting the ions generated inside the ion generation container (11) to generate an ion beam; and a shielding member (30) provided on the inner side and in the vicinity of an inner wall (10d) of the vacuum chamber (10A), having a main body section (31) comprising an electric conductive metal for the purpose of blocking the adhesion of an insulating material onto the inner wall (10d) of the vacuum chamber (10A). Provided in the main body section (31) of the shielding member (30) are a plurality of protrusion-shaped support parts (32), which establish contact with the inner wall (10d) of the vacuum chamber (10A) to support the main body section (31) in such a manner that the mounting thereof onto the inner wall (10d) of the vacuum chamber (10A) establishes a gap therebetween.

Inventors:

HIGASHI AKIO (JP)
SASAKI NARUYASU (JP)
TERASAWA TOSHIHIRO (JP)

Application Number:

PCT/JP2018/030048

Publication Date:

March 21, 2019

Filing Date:

August 10, 2018

Export Citation:

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Assignee:

ULVAC INC (JP)

International Classes:

H01J27/04; H01J37/08

Foreign References:

JP2016177870A	2016-10-06
JP2011124059A	2011-06-23
JPH01235130A	1989-09-20
JPH01159353U	1989-11-06
JP2001076635A	2001-03-23
JPH05182623A	1993-07-23

Other References: