Title:
ION SOURCE AND ION INJECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/077970
Kind Code:
A1
Abstract:
The present invention provides a long-life ion source capable of generating a large number of aluminum ions. A filament 20 is energized to increase the temperature of a cathode 22 arranged inside a chamber 21, thereby heating a raw material block 28 of aluminum nitride arranged at the side of the cathode 22 to react with fluorine compound gas that is introduced, thus causing emission of aluminum fluoride. Thermal electrons which are emitted from the cathode 22 and accelerated are caused to reciprocate between the cathode 22 and a repeller electrode 23 and aluminum fluoride gas is decomposed, thereby generating aluminum ions. Thus, the present invention provides a long-life ion source capable of generating a large number of aluminum ions.
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Inventors:
SASAKI NARUYASU (JP)
HIGASHI AKIO (JP)
TERASAWA TOSHIHIRO (JP)
HIGASHI AKIO (JP)
TERASAWA TOSHIHIRO (JP)
Application Number:
PCT/JP2018/036195
Publication Date:
April 25, 2019
Filing Date:
September 28, 2018
Export Citation:
Assignee:
ULVAC INC (JP)
International Classes:
H01J27/20; C23C14/48; H01J37/08; H01J37/317; H01L21/265; H05H1/24
Foreign References:
| JP2015170451A | 2015-09-28 | |||
| JP2011124059A | 2011-06-23 | |||
| JP2010080429A | 2010-04-08 | |||
| JPH06325711A | 1994-11-25 | |||
| JP3325393B2 | 2002-09-17 | |||
| JP4428467B1 | 2010-03-10 | |||
| US20140062286A1 | 2014-03-06 |
Other References:
SHINKU, vol. 9, no. 5, 1966, pages 183 - 189
WANG ZHENYAXU, LEIWU WENTAONANJING: "ULVAC IH-860DSIC ULVAC Ion Implantation System Analysis", WWW.LAMRESEARCH.COM, 20 February 2017 (2017-02-20), pages 1 - 11, XP093146662, Retrieved from the Internet [retrieved on 20240328]
See also references of EP 3699946A4
WANG ZHENYAXU, LEIWU WENTAONANJING: "ULVAC IH-860DSIC ULVAC Ion Implantation System Analysis", WWW.LAMRESEARCH.COM, 20 February 2017 (2017-02-20), pages 1 - 11, XP093146662, Retrieved from the Internet
See also references of EP 3699946A4
Attorney, Agent or Firm:
ISHIJIMA Shigeo et al. (JP)
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