Title:
IRRADIATION METHOD OF LASER, FREQUENCY ADJUSTMENT METHOD OF PIEZOELECTRIC VIBRATOR USING SAME, AND FREQUENCY-ADJUSTED PIEZOELECTRIC DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2011/043357
Kind Code:
A1
Abstract:
Disclosed are an irradiation method of a laser, a frequency adjustment method of a piezoelectric vibrator using the same, and a frequency-adjusted piezoelectric device using the same capable of minimizing damage to silicon material or surrounding constituent elements, while the laser is transmitted through the silicon material and is irradiated preferably onto an object ahead of the same. Accordingly, as a laser to be used, a so-called "femtosecond laser" which is a pulse laser of a pulse width of 50 to 1000 fs (femtoseconds) is selected. This technology can, for example, preferably be used when irradiating a laser onto a piezoelectric vibrator contained in the interior of an electronic component package comprising silicon material to adjust the resonance frequency thereof.
Inventors:
TADA KOZO (JP)
ITO YOSHIRO (JP)
ITO YOSHIRO (JP)
Application Number:
PCT/JP2010/067501
Publication Date:
April 14, 2011
Filing Date:
October 06, 2010
Export Citation:
Assignee:
CITIZEN FINETECH MIYOTA CO LTD (JP)
NAT UNIV CORP NAGAOKA UNIV TEC (JP)
TADA KOZO (JP)
ITO YOSHIRO (JP)
NAT UNIV CORP NAGAOKA UNIV TEC (JP)
TADA KOZO (JP)
ITO YOSHIRO (JP)
International Classes:
H03H3/04; B23K26/00; B23K26/36; H01L41/09
Foreign References:
| JP2007163452A | 2007-06-28 | |||
| JP2004289237A | 2004-10-14 | |||
| JPH1117488A | 1999-01-22 | |||
| JP2000106515A | 2000-04-11 | |||
| JP2008078869A | 2008-04-03 | |||
| JPH0529863A | 1993-02-05 |
Attorney, Agent or Firm:
FUKUMOTO, Masahiko (JP)
Masahiko Fukumoto (JP)
Masahiko Fukumoto (JP)
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