Title:
IRRADIATION UNIT, LAMP UNIT, AND LAMP HOLDER
Document Type and Number:
WIPO Patent Application WO/2023/145178
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide an irradiation unit and a lamp unit, for which lamp replacement work is simplified, and the risk of lamp breakage is reduced. The present invention comprises a lamp unit in which an excimer lamp having an arc tube extending in a first direction as well as a first electrode and a second electrode arranged face-to-face in a radial direction of the arc tube is mounted and a case which accommodates the excimer lamp due to the lamp unit being inserted therein, wherein the lamp unit comprises a plate material, a restriction member which is formed to protrude from a first main surface and restricts movement of the excimer lamp inside the case, and a power supply part which is disposed on a second main surface side of the plate material positioned on the outer side of the case when an insertion opening is closed by the plate material and supplies electric power to the excimer lamp.
Inventors:
KASAGI KUNIO (JP)
ISHIHARA HAJIME (JP)
YAMASHITA SHINJI (JP)
ISHIHARA HAJIME (JP)
YAMASHITA SHINJI (JP)
Application Number:
PCT/JP2022/040578
Publication Date:
August 03, 2023
Filing Date:
October 31, 2022
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
H01J65/00; B01J19/12; G03F7/20
Foreign References:
| JP2008104980A | 2008-05-08 | |||
| JP2015069734A | 2015-04-13 | |||
| JP2021103622A | 2021-07-15 | |||
| JP2013105555A | 2013-05-30 | |||
| JP2016137054A | 2016-08-04 |
Attorney, Agent or Firm:
KIMURA Masayoshi (JP)
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