ISOLATION TECHNIQUE FOR PRESSURE SENSING STRUCTURE

Title:

ISOLATION TECHNIQUE FOR PRESSURE SENSING STRUCTURE

Document Type and Number:

WIPO Patent Application WO2001053789

Kind Code:

A9

Abstract:

An electronic pressure-sensing device (6) is isolated from corrosive, conductive gasses and fluids by a corrosion resistant metal diaphragm (101b) welded to a pressure port (19). The pressure-sensing device (6) is attached to a support structure (14) with a hole (18) that provides a path from the diaphragm area (101b) to the pressure-sensing device (6). A fill fluid is sealed behind the diaphragm (101b) and fills the hole through the support structure (14) to the electronic pressure-sensing device (6). In this design, any hostile chemical applied is completely isolated from the electronic sensor and associated adhesive seals (15) by the metal diaphragm (101b).

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Inventors:

WAGNER DAVID E (US)
LOPOPOLO GERALD (US)
HOFFMAN JAMES H (US)

Application Number:

PCT/US2001/001962

Publication Date:

October 24, 2002

Filing Date:

January 19, 2001

Export Citation:

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Assignee:

SILICON VALLEY SENSORS INC (US)
WAGNER DAVID E (US)
LOPOPOLO GERALD (US)
HOFFMAN JAMES H (US)

International Classes:

G01L7/08; G01L9/00; (IPC1-7): G01L7/08

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