Title:
JIG FOR WET ETCHING
Document Type and Number:
WIPO Patent Application WO/2011/135655
Kind Code:
A1
Abstract:
Disclosed is a jig for wet etching (1), which holds a board-like subject to be processed at the time of wet etching the subject. The jig is provided with: a holding section configured of a sucking section wherein a suction port (17) for sucking air is formed, and a first adhering section (15), which is provided so as to surround the circumference of the sucking section, and which can adhere to the first surface of the subject so as to surround a predetermined region of the first surface; an air-releasing path communicated with the suction port; and a check valve (12), which is provided in the air-releasing path, blocks the flow of air that flows toward the sucking section, and permits air to flow from the sucking section.
Inventors:
NISHIMOTO, Yoichiro (7-3 Marunouchi 2-chome, Chiyoda-k, Tokyo 10, 〒1008310, JP)
Application Number:
JP2010/057384
Publication Date:
November 03, 2011
Filing Date:
April 26, 2010
Export Citation:
Assignee:
Mitsubishi Electric Corporation (7-3 Marunouchi 2-chome, Chiyoda-ku Tokyo, 10, 〒1008310, JP)
三菱電機株式会社 (〒10 東京都千代田区丸の内二丁目７番３号 Tokyo, 〒1008310, JP)
三菱電機株式会社 (〒10 東京都千代田区丸の内二丁目７番３号 Tokyo, 〒1008310, JP)
International Classes:
H01L21/306; B65G49/06; C23F1/08; H01L21/683
Attorney, Agent or Firm:
SAKAI, Hiroaki (Sakai International Patent Office, Kasumigaseki Building 2-5, Kasumigaseki 3-chome, Chiyoda-k, Tokyo 20, 〒1006020, JP)
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