Title:
JOINED BODY AMD ELASTIC WAVE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2021/002047
Kind Code:
A1
Abstract:
[Problem] To provide a joined body that enables improvement of a Q value of an elastic wave element. [Solution] A joined body 9A includes a support substrate 6, a piezoelectric material substrate 1A, and a silicon oxide layer 2 between the support substrate and the piezoelectric material substrate. The silicon oxide layer 2 has a composition of SiOx (x is greater than 2).
Inventors:
ASAI KEIICHIRO (JP)
HATTORI RYOSUKE (JP)
TAI TOMOYOSHI (JP)
UNO YUDAI (JP)
HATTORI RYOSUKE (JP)
TAI TOMOYOSHI (JP)
UNO YUDAI (JP)
Application Number:
PCT/JP2020/007136
Publication Date:
January 07, 2021
Filing Date:
February 21, 2020
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H03H9/25; H03H3/08
Domestic Patent References:
| WO2018016314A1 | 2018-01-25 | |||
| WO2018180827A1 | 2018-10-04 |
Foreign References:
| JP2018207355A | 2018-12-27 |
Attorney, Agent or Firm:
HOSODA Masutoshi et al. (JP)
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