JOINING METHOD, JOINING DEVICE AND JOINING SYSTEM

WIPO Patent Application WO/2022/158520

A1

This joining method, for joining two substrates (W1, W2) involves: a heat treatment step which in which the joining surfaces of two substrates (W1, W2) to be joined together are heated to a temperature higher than 60°C in a reduced pressure atmosphere; an activation treatment step in which, after the heat treatment step the joining surfaces of the two substrates (W1, W2) are activated in a state in which the reduced pressure atmosphere is maintained; and a joining step in which, after the activation treatment step the two substrates (W1, W2) are joined in a state in which the reduced pressure atmosphere is maintained. Further, in the heat treatment step, in a state in which the reduced pressure atmosphere is maintained, the state in which the joining surfaces of the two substrates (W1, W2) have been heated to a temperature higher than 60°C may be optionally maintained for at least 30 seconds. The air pressure in the heat treatment step is optionally less than or equal to 10-2 Pa.

JPH0811308	PROBLEM TO BE SOLVED: To manufacture a titanium clad steel sheet by hot rolling.
JP2000313677	JOINED PRODUCT OF CARBON-BASED MATERIAL WITH METAL

SUGA TADATOMO (JP)
YAMAUCHI AKIRA (JP)

PCT/JP2022/001970

July 28, 2022

January 20, 2022

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BONDTECH CO LTD (JP)
SUGA TADATOMO (JP)

B23K20/00; H01L21/02

WO2015163461A1	2015-10-29
WO2017155002A1	2017-09-14
WO2012105474A1	2012-08-09

JP2014103291A	2014-06-05
JP2018074050A	2018-05-10
JP2004297693A	2004-10-21
JP2010109949A	2010-05-13
JP2008071787A	2008-03-27

KIMURA Mitsuru (JP)

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