Title:
JOINT AND ELASTIC WAVE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2019/188350
Kind Code:
A1
Abstract:
[Problem] To increase the bond strength between a support substrate comprising a polycrystalline ceramic material or a single crystal material and a piezoelectric single crystal substrate; and to increase the Q value. [Solution] A joint 5, 5A comprising: a support substrate 1;a piezoelectric single crystal substrate 4, 4A; and a bonding layer 2A provided between the support substrate 1 and the piezoelectric single crystal substrate 4, 4A. The bonding layer 2A has an Si(1–x)Ox composition (x being the oxygen ratio). The oxygen ratio x in the center of the bonding layer 2A, in the thickness direction, is higher than the oxygen ratio x at the end on the piezoelectric single crystal substrate 4, 4A side of the bonding layer 2A and the oxygen ratio x at the end on the support substrate 1 side of the bonding layer 2A. The oxygen ratio x in the center of the bonding layer 2A, in the thickness direction, is 0.013–0.666.
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Inventors:
GOTO MASASHI (JP)
UNO YUDAI (JP)
TAI TOMOYOSHI (JP)
UNO YUDAI (JP)
TAI TOMOYOSHI (JP)
Application Number:
PCT/JP2019/010572
Publication Date:
October 03, 2019
Filing Date:
March 14, 2019
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H03H9/25
Domestic Patent References:
| WO2018016169A1 | 2018-01-25 | |||
| WO2013129572A1 | 2013-09-06 | |||
| WO2012124648A1 | 2012-09-20 | |||
| WO2017051747A1 | 2017-03-30 |
Attorney, Agent or Firm:
HOSODA Masutoshi et al. (JP)
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