Title:
KNOCKDOWN-TYPE HERMETICALLY SEALED CHAMBER
Document Type and Number:
WIPO Patent Application WO/2011/104865
Kind Code:
A1
Abstract:
Disclosed is a hermetically sealed chamber, which has a seal member easily attached thereto, and at the same time, has a reduced number of members required at the time of attaching the seal member, and which can be easily carried.
The chamber is composed of the top plate (3) and the bottom plate (3), which have a rectangular shape, a pair of side plates (1, 1), a pair of side plates (2), respectively, having exhaust ports, and a skeleton seal member (4). In the state where the skeleton seal member (4) is fitted in the seal grooves (D11-D14) in the side plates (1), and in the seal grooves (D21, D22) in the side plates (2) having exhaust ports, between the side plates (1) and the side plates (2) adjacent to the side plates (1), between the top plate (3) and the side plate frame, and between the bottom plate (3) and the side plate frame are fastened by screwing bolts (B) into screw holes provided in each of the side plates (1) and the side plates (2).
Inventors:
YOSHIDA Hidehiko (1-1,Marunouchi 3-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
吉田 秀彦 (〒05 東京都千代田区丸の内三丁目１番１号 入江工研株式会社内 Tokyo, 〒1000005, JP)
NAKAGAWA Masaharu (1-1,Marunouchi 3-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
吉田 秀彦 (〒05 東京都千代田区丸の内三丁目１番１号 入江工研株式会社内 Tokyo, 〒1000005, JP)
NAKAGAWA Masaharu (1-1,Marunouchi 3-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
Application Number:
JP2010/053092
Publication Date:
September 01, 2011
Filing Date:
February 26, 2010
Export Citation:
Assignee:
IRIE KOKEN CO.,LTD. (1-1Marunouchi 3-chome, Chiyoda-ku Tokyo, 05, 〒1000005, JP)
入江工研株式会社 (〒05 東京都千代田区丸の内三丁目１番１号 Tokyo, 〒1000005, JP)
YOSHIDA Hidehiko (1-1,Marunouchi 3-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
吉田 秀彦 (〒05 東京都千代田区丸の内三丁目１番１号 入江工研株式会社内 Tokyo, 〒1000005, JP)
入江工研株式会社 (〒05 東京都千代田区丸の内三丁目１番１号 Tokyo, 〒1000005, JP)
YOSHIDA Hidehiko (1-1,Marunouchi 3-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
吉田 秀彦 (〒05 東京都千代田区丸の内三丁目１番１号 入江工研株式会社内 Tokyo, 〒1000005, JP)
International Classes:
F16J15/10; B01J3/00; F16J12/00; H01L21/02; H01L21/205
Attorney, Agent or Firm:
KAYAHARA, Yuji (722 Renai Gyoen Plaza, 24-7 Shinjuku 1-chome, Shinjuku-k, Tokyo 22, 〒1600022, JP)
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