Title:
LAMB WAVE RESONATOR AND MANUFACTURING METHOD, FILTER, RADIO FREQUENCY MODULE, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/046099
Kind Code:
A1
Abstract:
A Lamb wave resonator (100) and a manufacturing method, a filter (10), a radio frequency module, and an electronic device (1). The Lamb wave resonator (100) serves as an element of the filter (10) and can be applied to a radio frequency device. The Lamb wave resonator (100) comprises: a substrate (140), a piezoelectric layer (110), an interdigital transducer (120), and a dielectric layer (130). The piezoelectric layer (110) is provided on the substrate (140), and the interdigital transducer (120) and the dielectric layer (130) are provided on the side of the piezoelectric layer (110) away from the substrate (140). The interdigital transducer (120) comprises a plurality of first electrode fingers (121b) and a plurality of second electrode fingers (122b), the plurality of first electrode fingers (121b) and the plurality of second electrode fingers (122b) being sequentially and alternately arranged in a first direction (X), and the first direction (X) intersecting the extension direction of the first electrode fingers (121b) and the second electrode fingers (122b). The dielectric layer (130) comprises first parts (131), the first parts (131) being provided on the surface of the piezoelectric layer (110) and being located on the peripheries of the first electrode fingers (121b) and the second electrode fingers (122b).
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Inventors:
TAO XIANG (CN)
JIANG XIN (CN)
TANG DAIPING (CN)
GU JIAN (CN)
KE HAN (CN)
LUAN ZHONGZHI (CN)
JIANG XIN (CN)
TANG DAIPING (CN)
GU JIAN (CN)
KE HAN (CN)
LUAN ZHONGZHI (CN)
Application Number:
PCT/CN2023/112727
Publication Date:
March 07, 2024
Filing Date:
August 11, 2023
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
H03H9/145; H03H9/02
Foreign References:
| CN102089970A | 2011-06-08 | |||
| CN114866057A | 2022-08-05 | |||
| CN114726334A | 2022-07-08 | |||
| CN112702036A | 2021-04-23 | |||
| CN112953454A | 2021-06-11 | |||
| CN114421919A | 2022-04-29 | |||
| CN114584103A | 2022-06-03 | |||
| US20220173718A1 | 2022-06-02 |
Attorney, Agent or Firm:
BEIJING ZBSD PATENT & TRADEMARK AGENT LTD. (CN)
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