Title:
LAMINATE FILM
Document Type and Number:
WIPO Patent Application WO/2019/039461
Kind Code:
A1
Abstract:
This laminate film is provided with a base material, and a thin film layer laminated on at least one surface of the base material. The thin film layer includes silicon atoms, oxygen atoms, and carbon atoms. In a carbon distribution curve indicating the relationship between the distance from the surface of the thin film layer in the thickness direction of the thin film layer, and the ratio (the carbon atom ratio) of the number of carbon atoms to the total number of silicon atoms, oxygen atoms, and carbon atoms included in the thin film layer at a point located at said distance, there are at least three extreme values. The difference between the largest maximum value and the smallest maximum value is 14 at% or lower. The largest extreme value is in the range of 23-33 at%. At least one non-continuous area is provided which satisfies formulae (1)-(3), namely 3at%≤a-b, 3at%≤b-c, and 0.5<(a-c)/dx.
Inventors:
MAKIDERA MASAMI (JP)
ARIMURA TAKASHI (JP)
YAMASHITA YASUHIRO (JP)
HANAOKA HIDENORI (JP)
ARIMURA TAKASHI (JP)
YAMASHITA YASUHIRO (JP)
HANAOKA HIDENORI (JP)
Application Number:
PCT/JP2018/030790
Publication Date:
February 28, 2019
Filing Date:
August 21, 2018
Export Citation:
Assignee:
SUMITOMO CHEMICAL CO (JP)
International Classes:
B32B9/00; C23C16/42; H01L51/50; H05B33/02; H05B33/04; H05B33/14
Domestic Patent References:
| WO2015107702A1 | 2015-07-23 | |||
| WO2018101026A1 | 2018-06-07 | |||
| WO2013146964A1 | 2013-10-03 |
Foreign References:
| JP2015206096A | 2015-11-19 |
Other References:
See also references of EP 3674078A4
Attorney, Agent or Firm:
NAKAYAMA, Tohru et al. (JP)
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