LAMINATE AND METHOD FOR FORMATION THEREOF, INSULATING FILM, SEMICONDUCTOR DEVICE, AND COMPOSITION FOR FORMING FILM

Title:

LAMINATE AND METHOD FOR FORMATION THEREOF, INSULATING FILM, SEMICONDUCTOR DEVICE, AND COMPOSITION FOR FORMING FILM

Document Type and Number:

WIPO Patent Application WO/2005/042247

Kind Code:

A1

Abstract:

A laminate which comprises a first silica-based film, a second silica-based film and an organic film, wherein the second silica-based film has a mono-valent organic group containing a carbon-carbon double bond or a carbon-carbon triple bond; a method for forming the above laminate which comprises forming a first coating film for the first silica-based film on a substrate, forming a second coating film having a mono-valent organic group containing a carbon-carbon double bond or a carbon-carbon triple bond for the second silica-based film on the first coating film, forming a third coating film for the organic film on the second coating film, and then curing a laminated film comprising the above first to third coating films; an insulating film; a semiconductor device; and a composition for forming the film. The above laminate has a low dielectric constant, and also is excellent in the adhesiveness between the films.

Inventors:

AKIYAMA MASAHIRO (JP)
HATTORI SEITARO (JP)
KUROSAWA TAKAHIKO (JP)
SEKIGUCHI MANABU (JP)
KOKUBO TERUKAZU (JP)
MITA MICHIHIRO (JP)
YAMANAKA TATSUYA (JP)
OBI MASAKI (JP)

Application Number:

PCT/JP2004/016110

Publication Date:

May 12, 2005

Filing Date:

October 29, 2004

Export Citation:

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Assignee:

JSR CORP (JP)
AKIYAMA MASAHIRO (JP)
HATTORI SEITARO (JP)
KUROSAWA TAKAHIKO (JP)
SEKIGUCHI MANABU (JP)
KOKUBO TERUKAZU (JP)
MITA MICHIHIRO (JP)
YAMANAKA TATSUYA (JP)
OBI MASAKI (JP)

International Classes:

C09D183/14; H01L21/312; H01L21/768; (IPC1-7): B32B27/00; C09D183/14; H01L21/312

Foreign References:

JPH0952320A	1997-02-25
JP2002038091A	2002-02-06
JP2002009066A	2002-01-11
JP2002038081A	2002-02-06
JPH0952320A	1997-02-25
JP2002038091A	2002-02-06
JP2002009066A	2002-01-11

Other References: