Title:
LAMINATE, METHOD FOR PRODUCING SAME, AND FUNCTIONAL ELEMENT USING SAME
Document Type and Number:
WIPO Patent Application WO/2011/108552
Kind Code:
A1
Abstract:
Disclosed is a laminate which comprises a transparent conductive film layer that is composed of an oxide thin film which is mainly composed of titanium oxide and contains an additional element such as niobium. The transparent conductive film layer contains an anatase phase having more excellent crystallinity and has high refractive index and low resistivity due to an optimal buffer layer that is formed on the substrate. Also disclosed are: a semiconductor light emitting element which comprises the laminate; and a functional element such as a solar cell, which comprises the laminate. Specifically disclosed is a laminate which is characterized in that: a buffer layer, which is composed of one or more thin films selected from among a gallium oxide thin film, an oxide thin film composed of gallium, indium and oxygen, and an oxide thin film composed of gallium, indium, aluminum and oxygen, is formed on a substrate; and a transparent conductive film layer that is composed of an oxide thin film, which is mainly composed of titanium oxide and contains one or more elements selected from among niobium, tantalum, molybdenum, arsenic, antimony and tungsten, is formed on the buffer layer.
Inventors:
CHICHIBU Shigefusa (2-1-1 Katahira, Aoba-ku, Sendai-sh, Miyagi 77, 〒9808577, JP)
秩父 重英 (〒77 宮城県仙台市青葉区片平二丁目１番１号国立大学法人東北大学内 Miyagi, 〒9808577, JP)
HAZU Kouji (2-1-1 Katahira, Aoba-ku, Sendai-sh, Miyagi 77, 〒9808577, JP)
羽豆 耕治 (〒77 宮城県仙台市青葉区片平二丁目１番１号国立大学法人東北大学内 Miyagi, 〒9808577, JP)
秩父 重英 (〒77 宮城県仙台市青葉区片平二丁目１番１号国立大学法人東北大学内 Miyagi, 〒9808577, JP)
HAZU Kouji (2-1-1 Katahira, Aoba-ku, Sendai-sh, Miyagi 77, 〒9808577, JP)
羽豆 耕治 (〒77 宮城県仙台市青葉区片平二丁目１番１号国立大学法人東北大学内 Miyagi, 〒9808577, JP)
Application Number:
JP2011/054659
Publication Date:
September 09, 2011
Filing Date:
March 01, 2011
Export Citation:
Assignee:
SUMITOMO METAL MINING CO., LTD. (11-3, Shimbashi 5-chome Minato-k, Tokyo 16, 〒1058716, JP)
住友金属鉱山株式会社 (〒16 東京都港区新橋５丁目１１番３号 Tokyo, 〒1058716, JP)
TOHOKU UNIVERSITY (2-1-1, Katahira Aoba-ku, Sendai-sh, Miyagi 77, 〒9808577, JP)
国立大学法人東北大学 (〒77 宮城県仙台市青葉区片平二丁目１番１号 Miyagi, 〒9808577, JP)
CHICHIBU Shigefusa (2-1-1 Katahira, Aoba-ku, Sendai-sh, Miyagi 77, 〒9808577, JP)
秩父 重英 (〒77 宮城県仙台市青葉区片平二丁目１番１号国立大学法人東北大学内 Miyagi, 〒9808577, JP)
住友金属鉱山株式会社 (〒16 東京都港区新橋５丁目１１番３号 Tokyo, 〒1058716, JP)
TOHOKU UNIVERSITY (2-1-1, Katahira Aoba-ku, Sendai-sh, Miyagi 77, 〒9808577, JP)
国立大学法人東北大学 (〒77 宮城県仙台市青葉区片平二丁目１番１号 Miyagi, 〒9808577, JP)
CHICHIBU Shigefusa (2-1-1 Katahira, Aoba-ku, Sendai-sh, Miyagi 77, 〒9808577, JP)
秩父 重英 (〒77 宮城県仙台市青葉区片平二丁目１番１号国立大学法人東北大学内 Miyagi, 〒9808577, JP)
International Classes:
B32B9/00; C23C14/06; H01B5/14; H01B13/00; H01L31/04; H01L33/32; H01L33/42
Attorney, Agent or Firm:
OSHIDA Yoshitaka (Ginza bldg, 3-12 Ginza 3-chom, Chuo-ku Tokyo 61, 〒1040061, JP)
Claims: