Title:
LAMINATE, PIEZOELECTRIC DEVICE IN WHICH SAME IS USED, AND METHOD FOR MANUFACTURING PIEZOELECTRIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/189397
Kind Code:
A1
Abstract:
The purpose of the present invention is to minimize the incidence of cracking in a functional layer while maintaining flexibility of a laminate. This laminate has a polymer substrate and a crystalline functional layer formed on a first surface of the substrate, the surface roughness of the first surface of the substrate being 3 nm or less in terms of arithmetic mean roughness (Ra).
Inventors:
NAKAMURA DAISUKE (JP)
NAGAOKA NAOKI (JP)
KUROSE MANAMI (JP)
ISHIKAWA TAKETO (JP)
MACHINAGA HIRONOBU (JP)
NAGAOKA NAOKI (JP)
KUROSE MANAMI (JP)
ISHIKAWA TAKETO (JP)
MACHINAGA HIRONOBU (JP)
Application Number:
PCT/JP2020/010177
Publication Date:
September 24, 2020
Filing Date:
March 10, 2020
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
B32B27/06; H01L41/047; H01L41/187; H01L41/313; H01L41/319
Foreign References:
| JP2018046277A | 2018-03-22 | |||
| JP2018170503A | 2018-11-01 | |||
| JP2019011516A | 2019-01-24 | |||
| JP2018137268A | 2018-08-30 | |||
| JP2018170503A | 2018-11-01 | |||
| JP2019052877A | 2019-04-04 |
Other References:
See also references of EP 3943292A4
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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