LAMINATED BODY INCLUDING NOVOLAC RESIN AS PEELING LAYER

Title:

LAMINATED BODY INCLUDING NOVOLAC RESIN AS PEELING LAYER

Document Type and Number:

WIPO Patent Application WO/2019/088103

Kind Code:

A1

Abstract:

[Problem] To provide: a laminated body comprising an intermediate layer which is adhered in a peelable manner between a support body and an item to be processed, the laminated body being configured to separate the item to be processed by cutting and the like or to perform processing such as polishing a wafer backside, wherein the intermediate layer includes a peeling layer in contact with at least the support body side, the peeling layer including a novolac resin which is transformed by absorbing light of 190 nm to 600 nm irradiated via the support body; a material that can be separated without mechanical addition; and a method. [Solution] Provided is a laminated body for polishing the backside of a wafer, the laminated body comprising an intermediate layer bonded in a peelable manner between a support body and a circuit surface of the wafer. The intermediate layer comprises an adhesive layer contacting the wafer side and a peeling layer contacting the support body side. The peeling layer includes a novolac resin which is transformed by absorbing light of 190 nm to 600 nm irradiated via the support body. The peeling layer has an optical transmissivity of 1 to 90% in a range of between 190 nm and 600 nm. The transformation due to optical absorption is photodecomposition of the novolac resin.

Inventors:

OGINO HIROSHI (JP)
NISHIMAKI HIROKAZU (JP)
KARASAWA RYO (JP)
SHINJO TETSUYA (JP)
KAMIBAYASHI SATOSHI (JP)
MORIYA SHUNSUKE (JP)
OKUNO TAKAHISA (JP)

Application Number:

PCT/JP2018/040342

Publication Date:

May 09, 2019

Filing Date:

October 30, 2018

Export Citation:

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Assignee:

NISSAN CHEMICAL CORP (JP)

International Classes:

H01L21/304; B32B7/023; B32B7/06; B32B27/00; H01L21/02; H01L21/683

Domestic Patent References:

WO2015190438A1

2015-12-17

Foreign References:

JP2017050322A	2017-03-09
JP2017069541A	2017-04-06
JP2014103229A	2014-06-05
JP2004064040A	2004-02-26
JP2012106486A	2012-06-07

Other References: