Title:
LAMINATED BODY PRODUCTION APPARATUS AND SELF-ASSEMBLED MONOLAYER FORMATION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/201853
Kind Code:
A1
Abstract:
Provided is a laminated body production apparatus which makes it possible to form a highly dense self-assembled monolayer on the surface of a substrate. More specifically, the laminated body production apparatus is provided with a vacuum chamber in which a substrate is housed, a gas inlet port through which a gas is introduced into the vacuum chamber, and a plasma generation unit which forms a plasma atmosphere in the vacuum chamber, the laminated body production apparatus being configured such that a film-forming surface of the substrate is modified by the action of the plasma atmosphere formed by the plasma generation unit while supplying an evaporation source capable of imparting a hydrophilic group into the vacuum chamber, and the following modes can be achieved: a surface-hydrophilizing mode in which the film-forming surface is hydrophilized; and a self-assembling mode in which an evaporation source for a precursor material for a self-assembled monolayer is supplied to the substrate in which the film-forming surface has been hydrophilized while vacuumizing the inside of the vacuum chamber and while supplying an evaporation source capable of promoting the hydrolysis of the precursor material for the self-assembled monolayer to thereby form a self-assembled monolayer on the hydrophilized film-forming surface.
Inventors:
SUGANUMA NAOTO (JP)
TERADA TOYOHARU (JP)
YAMAHARA MOTOHIRO (JP)
NOBORIO KAZUYUKI (JP)
TAGUCHI KOJI (JP)
TERADA TOYOHARU (JP)
YAMAHARA MOTOHIRO (JP)
NOBORIO KAZUYUKI (JP)
TAGUCHI KOJI (JP)
Application Number:
PCT/JP2022/003354
Publication Date:
September 29, 2022
Filing Date:
January 28, 2022
Export Citation:
Assignee:
TORAY ENG CO LTD (JP)
International Classes:
C23C14/12; B01J19/08; B32B39/00; C08J7/00; C23C14/02; H05H1/46
Foreign References:
| JP2016025315A | 2016-02-08 | |||
| JPH098033A | 1997-01-10 | |||
| JP2020510314A | 2020-04-02 | |||
| JP2008231574A | 2008-10-02 | |||
| JP2014531508A | 2014-11-27 |
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