Title:
LAMINATED STRUCTURE, AND ELECTRODE FOR ELECTRIC CIRCUIT USING THE SAME
Document Type and Number:
WIPO Patent Application WO/2007/086280
Kind Code:
A1
Abstract:
A thin film composed of a thin film of ITO and a thin film of molybdenum stacked on top of each other has hitherto been used as a part of an electric circuit, for example, in liquid crystal displays. However, it is known that, when the thin film of molybdenum is formed on the thin film of ITO, internal stress takes place in each of the thin films, disadvantageously leading to separation of the thin film or breaking. To overcome this problem, a laminated film forming technique, which can simplify the step of film formation and the step of etching while preventing cracking and breaking caused by stress between the thin film of ITO and the thin film of molybdenum, has been demanded. As a result of extensive and intensive studies for solving the above problem, it was found that, when the thickness of a transparent electroconductive film is not more than 35 nm, the adhesion of the transparent electroconductive thin film and the thin film of molybdenum metal can be enhanced. By virtue of this finding, the prevention of cracking and breaking and an improvement in yield by the simplification of the process could have been simultaneously realized.
More Like This:
Inventors:
UMENO, Satoshi (1280, Kamiizumi Sodegaura-sh, Chiba 93, 2990293, JP)
梅野 聡 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 2990293, JP)
HONDA, Katsunori (1280, Kamiizumi Sodegaura-sh, Chiba 93, 2990293, JP)
本田 克典 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 2990293, JP)
梅野 聡 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 2990293, JP)
HONDA, Katsunori (1280, Kamiizumi Sodegaura-sh, Chiba 93, 2990293, JP)
本田 克典 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 2990293, JP)
Application Number:
JP2007/050497
Publication Date:
August 02, 2007
Filing Date:
January 16, 2007
Export Citation:
Assignee:
IDEMITSU KOSAN CO., LTD. (1-1 Marunouchi 3-chome, Chiyoda-ku Tokyo, 21, 1008321, JP)
出光興産株式会社 (〒21 東京都千代田区丸の内三丁目１番１号 Tokyo, 1008321, JP)
UMENO, Satoshi (1280, Kamiizumi Sodegaura-sh, Chiba 93, 2990293, JP)
梅野 聡 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 2990293, JP)
HONDA, Katsunori (1280, Kamiizumi Sodegaura-sh, Chiba 93, 2990293, JP)
出光興産株式会社 (〒21 東京都千代田区丸の内三丁目１番１号 Tokyo, 1008321, JP)
UMENO, Satoshi (1280, Kamiizumi Sodegaura-sh, Chiba 93, 2990293, JP)
梅野 聡 (〒93 千葉県袖ヶ浦市上泉１２８０番地 Chiba, 2990293, JP)
HONDA, Katsunori (1280, Kamiizumi Sodegaura-sh, Chiba 93, 2990293, JP)
International Classes:
G02F1/1343; H01B5/02; H01B5/14; C23C14/08; H01B13/00
Attorney, Agent or Firm:
WATANABE, Kihei (Shibashin Kanda Bldg. 3rd Floor, 26 Kanda Suda-cho 1-chom, Chiyoda-ku Tokyo 41, 1010041, JP)
Download PDF:
Previous Patent: SEMICONDUCTOR NANOPARTICLES AND PROCESS FOR PRODUCTION THEREOF
Next Patent: HINGE AND ELECTRONIC APPARATUS EMPLOYING HINGE
Next Patent: HINGE AND ELECTRONIC APPARATUS EMPLOYING HINGE