LAMINATED STRUCTURE FOR MEASUREMENT OF INTENSITY OF REFLECTED LIGHT, DEVICE EQUIPPED WITH LAMINATED STRUCTURE FOR MEASUREMENT OF REFLECTED LIGHT, AND METHOD FOR DETERMINATION OF THICKNESS AND/OR MASS AND/OR VISCOSITY OF THIN FILM

WIPO Patent Application WO/2011/111785

A1

Disclosed is a laminated structure for measuring the intensity of reflected light, which can determine the thickness of a surface adsorbed film or the like with higher sensitivity by a simple optical technique. Specifically disclosed is a laminated structure for measuring the intensity of reflected light at at least one wavelength, which comprises an optical interference layer comprising a valve metal such metal titanium; and a method for determining the thickness or mass of a thin film of interest, which comprises irradiating the thin film with light in the laminated structure, and measuring the change in the intensity of reflected light at at least one wavelength in a measurement medium, thereby determining the thickness and/or mass and/or viscosity of the thin film.

KAWASAKI, Takayoshi (4259 Nagatsutacho, Midori-ku, Yokohama-sh, Kanagawa 03, 〒2268503, JP)
川▲崎▼　剛美 (〒03 神奈川県横浜市緑区長津田町４２５９　国立大学法人東京工業大学内 Kanagawa, 〒2268503, JP)

JP2011/055672

September 15, 2011

March 10, 2011

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Tokyo Institute of Technology (2-12-1, Ookayama Meguro-k, Tokyo 50, 〒1528550, JP)
国立大学法人東京工業大学 (〒50 東京都目黒区大岡山２－１２－１ Tokyo, 〒1528550, JP)
KAWASAKI, Takayoshi (4259 Nagatsutacho, Midori-ku, Yokohama-sh, Kanagawa 03, 〒2268503, JP)

G01N21/27; G01B11/06; G01N5/02; G01N11/00; G01N21/45

AOKI, Atsushi et al. (SEIWA PATENT & LAW, Toranomon 37 Mori Bldg. 5-1, Toranomon 3-chome, Minato-k, Tokyo 23, 〒1058423, JP)

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