Title:
LAMINATED STRUCTURE FOR MEASUREMENT OF INTENSITY OF REFLECTED LIGHT, DEVICE EQUIPPED WITH LAMINATED STRUCTURE FOR MEASUREMENT OF REFLECTED LIGHT, AND METHOD FOR DETERMINATION OF THICKNESS AND/OR MASS AND/OR VISCOSITY OF THIN FILM
Document Type and Number:
WIPO Patent Application WO/2011/111785
Kind Code:
A1
Abstract:
Disclosed is a laminated structure for measuring the intensity of reflected light, which can determine the thickness of a surface adsorbed film or the like with higher sensitivity by a simple optical technique.
Specifically disclosed is a laminated structure for measuring the intensity of reflected light at at least one wavelength, which comprises an optical interference layer comprising a valve metal such metal titanium; and a method for determining the thickness or mass of a thin film of interest, which comprises irradiating the thin film with light in the laminated structure, and measuring the change in the intensity of reflected light at at least one wavelength in a measurement medium, thereby determining the thickness and/or mass and/or viscosity of the thin film.
Inventors:
KAWASAKI TAKAYOSHI (JP)
OKAHATA YOSHIO (JP)
OKAHATA YOSHIO (JP)
Application Number:
PCT/JP2011/055672
Publication Date:
September 15, 2011
Filing Date:
March 10, 2011
Export Citation:
Assignee:
TOKYO INST TECH (JP)
KAWASAKI TAKAYOSHI (JP)
OKAHATA YOSHIO (JP)
KAWASAKI TAKAYOSHI (JP)
OKAHATA YOSHIO (JP)
International Classes:
G01N21/27; G01B11/06; G01N5/02; G01N11/00; G01N21/45
Foreign References:
| JP2009079938A | 2009-04-16 | |||
| JPH10132646A | 1998-05-22 | |||
| JP2009058483A | 2009-03-19 | |||
| JPH0688779A | 1994-03-29 | |||
| JP2009025312A | 2009-02-05 |
Other References:
FUJIMURA T ET AL.: "Silicon-Based Optical Thin-Film Biosensor Array for Real-time Measurements of Biomolecular Interaction", JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 44, no. 4B, 30 April 2005 (2005-04-30), pages 2849 - 2853, XP008160424
MANAKA Y ET AL.: "Simultaneous anomalous reflection and quartz-crystal microbalance measurements of protein bindings on a gold surface", CHEMICAL COMMUNICATION, vol. 34, 14 September 2007 (2007-09-14), pages 3574 - 3576, XP055109459
TAKAYOSHI KAWASAKI ET AL.: "Hikari Kanshoho to Suisho Hasshinshi Micro Blance-ho o Kumiawaseta Hyomen Kyuchaku Usumaku no Sokutei", CHEMICAL SOCIETY OF JAPAN, KOEN YOKOSHU, 90TH ANNUAL MEETING, vol. YOKO III, 12 March 2010 (2010-03-12), XP008169053
See also references of EP 2546633A4
MANAKA Y ET AL.: "Simultaneous anomalous reflection and quartz-crystal microbalance measurements of protein bindings on a gold surface", CHEMICAL COMMUNICATION, vol. 34, 14 September 2007 (2007-09-14), pages 3574 - 3576, XP055109459
TAKAYOSHI KAWASAKI ET AL.: "Hikari Kanshoho to Suisho Hasshinshi Micro Blance-ho o Kumiawaseta Hyomen Kyuchaku Usumaku no Sokutei", CHEMICAL SOCIETY OF JAPAN, KOEN YOKOSHU, 90TH ANNUAL MEETING, vol. YOKO III, 12 March 2010 (2010-03-12), XP008169053
See also references of EP 2546633A4
Attorney, Agent or Firm:
AOKI, Atsushi et al. (JP)
Aoki 篤 (JP)
Aoki 篤 (JP)
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Claims: