Title:
LAMINATED STRUCTURE, PIEZOELECTRIC ELEMENT, AND PIEZOELECTRIC ELEMENT PRODUCTION METHOD
Document Type and Number:
WIPO Patent Application WO/2017/002339
Kind Code:
A1
Abstract:
A piezoelectric element (1) is obtained by: laminating a first electrode layer (12), a first piezoelectric membrane (14) and a first opposite electrode layer (16) in this order on one surface of a first silicon substrate (11) to prepare a first structure (10); laminating a second electrode layer (22), a second piezoelectric membrane (24) and a second opposite electrode layer (26) in this order on one surface of a second silicon substrate (21) to prepare a second structure (20); bonding the first structure (10) to one surface (30a) of a vibration-plate base material (30) with the first opposite electrode layer (16) opposing the one surface (30a) of the vibration-plate base material (30); processing the other surface (30b) of the vibration-plate base material (30) bonded with the first structure (10) by polishing or etching so as to become a vibration plate (31); bonding the second structure (20) to the vibration plate (31) with the second opposite electrode layer (26) opposing the exposed surface of the vibration plate (31) to prepare a laminated structure (2); and removing at least some of the first silicon substrate (11) and second silicon substrate (21).
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Inventors:
FUJII TAKAMICHI (JP)
NAONO TAKAYUKI (JP)
NAONO TAKAYUKI (JP)
Application Number:
PCT/JP2016/003037
Publication Date:
January 05, 2017
Filing Date:
June 23, 2016
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
H01L41/09; H01L41/187; H01L41/113; H01L41/313; H01L41/316
Foreign References:
| JP2010034149A | 2010-02-12 | |||
| JP2010034448A | 2010-02-12 | |||
| JP2003046154A | 2003-02-14 | |||
| JP2015088521A | 2015-05-07 |
Attorney, Agent or Firm:
YANAGIDA, Masashi et al. (JP)
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