LAMP ARRAY FOR THERMAL PROCESSING CHAMBER

Title:

LAMP ARRAY FOR THERMAL PROCESSING CHAMBER

Document Type and Number:

WIPO Patent Application WO2002023109

Kind Code:

A9

Abstract:

A lamp array (12) for a thermal processing chamber. The lamp array includes a plurality of lamps arranged in a generally circular array (202). The plurality of lamps can be arranged in one or more concentric rings (440) to form a generally circular array (202). Additional lamp arrays (632) can be provided adjacent the circumference of the circular pattern. At least one row of lamps (734) can be provided tangentially to the circular portion of the lamp array to provide preheating or postheating of process gases in the flow direction of a rectangular chamber.

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Inventors:

DEACON THOMAS E
ANDERSON ROGER N
CARLSON DAVID K
COMITA PAUL

Application Number:

PCT/US2001/042178

Publication Date:

May 15, 2003

Filing Date:

September 11, 2001

Export Citation:

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Assignee:

APPLIED MATERIALS INC (US)

International Classes:

H01L21/00; H05B3/00; (IPC1-7): F27B5/14

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