Title:
LAMP LIGHTING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/111769
Kind Code:
A1
Abstract:
A lamp lighting method is provided with which it is possible to reduce wasted power that does not contribute to the exposure of an object to be exposed, and with which it is possible to increase the life of a lamp. During an exposure period for exposing an object X to be exposed, exposure power is supplied to the lamp, and outside the exposure period, standby power is supplied to the lamp that is lower than the exposure power, and with which it is possible to maintain the lighting state of the lamp.
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Inventors:
IKEDA TOMIHIKO (JP)
Application Number:
PCT/JP2018/043624
Publication Date:
June 13, 2019
Filing Date:
November 27, 2018
Export Citation:
Assignee:
PHOENIX ELECTRIC CO LTD (JP)
International Classes:
H01J61/88; G03F7/20
Domestic Patent References:
WO2012090489A1 | 2012-07-05 | |||
WO2013147052A1 | 2013-10-03 |
Foreign References:
JP2000003846A | 2000-01-07 | |||
JP2010056219A | 2010-03-11 | |||
JP2012212836A | 2012-11-01 | |||
JP2012174807A | 2012-09-10 | |||
JP2010123804A | 2010-06-03 | |||
JP2008027874A | 2008-02-07 |
Attorney, Agent or Firm:
TADA Yuji (JP)
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