Title:
LARGE-AREA QUARTZ WAFER GRINDING APPARATUS AND METHOD
Document Type and Number:
WIPO Patent Application WO/2023/116555
Kind Code:
A1
Abstract:
A large-area quartz wafer grinding apparatus and method. The grinding apparatus is provided with a base, supporting arm assemblies, a grinding disc, a rotating seat, a rotating motor, a carrying block and a disc trimming ring; the base is a square base arranged on a horizontal plane, and the supporting arm assemblies are mounted at both ends of a diagonal of the base; each supporting arm assembly comprises a swing arm, a swing arm shaft, a swing arm motor, an adjustable arm and rollers; the lower end of the swing arm shaft is connected to the swing arm motor; the upper end of the swing arm shaft is fixedly assembled with one end of the swing arm, the middle of the swing arm is assembled with one end of the adjustable arm, and the rollers are both mounted at the other ends of the swing arm and the adjustable arm; the grinding disc is mounted on the rotating seat; the rotating seat is driven by the rotating motor to operate; the carrying block is sleeved in the disc trimming ring; a quartz wafer is bonded to the bottom surface of the carrying block. According to the present invention, by means of improved design in two aspects, i.e., material removal and substrate retention, the purpose of ensuring that a processing surface shape for a large-area quartz wafer satisfies design requirements is achieved.
Inventors:
XU JIANMIN (CN)
DING JIE (CN)
ZHANG YONG (CN)
WANG LIANG (CN)
SU HAO (CN)
DI JIANXING (CN)
HAO JIANJUN (CN)
ZHANG YINGCHUN (CN)
WANG HUAEN (CN)
ZHANG XIANLING (CN)
CUI LIZHI (CN)
DING JIE (CN)
ZHANG YONG (CN)
WANG LIANG (CN)
SU HAO (CN)
DI JIANXING (CN)
HAO JIANJUN (CN)
ZHANG YINGCHUN (CN)
WANG HUAEN (CN)
ZHANG XIANLING (CN)
CUI LIZHI (CN)
Application Number:
PCT/CN2022/139437
Publication Date:
June 29, 2023
Filing Date:
December 16, 2022
Export Citation:
Assignee:
TANGSHAN GUOXIN JINGYUAN ELECTRONICS CO LTD (CN)
International Classes:
B24B29/00
Foreign References:
| CN201115926Y | 2008-09-17 | |||
| CN101249632A | 2008-08-27 | |||
| CN113941954A | 2022-01-18 | |||
| CN102601724A | 2012-07-25 | |||
| CN112192348A | 2021-01-08 | |||
| JPH09285950A | 1997-11-04 |
Attorney, Agent or Firm:
BEIJING HUICHENG UNITED INTELLECTUAL PROPERTY AGENCY CO., LTD. (CN)
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