Title:
LASER ANNEALING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/022552
Kind Code:
A1
Abstract:
Disclosed is a laser annealing device comprising: a laser light source for emitting a laser light; a laser light shaping unit, which receives the laser light emitted from the laser light source so as to shape same into a line beam of a certain size and shape; an imaging optical system, which focuses the shaped laser light while passing same therethrough so as to emit the focused laser light at a substrate to be annealed; and a substrate stage capable of loading the substrate thereon and moving same onto a plane that is parallel to a substrate surface, and further comprising a laser light correction unit for inspecting the state and path of a laser light until the laser light emitted from the laser light source reaches the substrate, and correcting the state and path of the laser light according to the inspection result. According to the present invention, changes in the path or state of a laser light, caused by the instability of a laser light source and an optical element on a path, are corrected such that light emittance for laser annealing can be performed at an accurate location of a substrate on a stage.
Inventors:
KIM SEON JOO (KR)
HA JAE KYUN (KR)
SO YU JIN (KR)
HA JAE KYUN (KR)
SO YU JIN (KR)
Application Number:
PCT/KR2018/010408
Publication Date:
January 30, 2020
Filing Date:
September 06, 2018
Export Citation:
Assignee:
COWINDST CO LTD (KR)
International Classes:
H01L21/67; C21D10/00; H01S3/10
Foreign References:
| JP5863568B2 | 2016-02-16 | |||
| JP2005116729A | 2005-04-28 | |||
| JP2005118815A | 2005-05-12 | |||
| KR20170048671A | 2017-05-10 | |||
| JP2018001217A | 2018-01-11 |
Attorney, Agent or Firm:
KIM, In Han (KR)
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