Title:
LASER APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/085111
Kind Code:
A1
Abstract:
One aspect of the present disclosure relates to a laser apparatus comprising: an oscillator for outputting pulsed laser light; a rotary stage for supporting an optical element disposed on the optical path of the pulsed laser light; a grating on which the pulsed laser light is caused to be incident via the optical element; a first drive mechanism for driving the rotary stage to change the angle of incidence on the grating; a second drive mechanism for driving the rotary stage with a drive amount smaller than that for the first drive mechanism to change the angle of incidence on the grating; a wavelength monitor for measuring a central wavelength of the pulsed laser light; and a processor for periodically changing a target wavelength for the pulsed laser light and, on the basis of the target wavelength and a measured value from the wavelength monitor, outputting a drive command to the second drive mechanism to control the central wavelength to the target wavelength. The processor calculates, in an interval which is an integer multiple of a wavelength command period, a moving average of the drive command value for the second drive mechanism. When the moving average value exceeds a threshold value, the processor returns the second drive mechanism back to an initial position, and causes a change in the angle of incidence due to the returning operation to be cancelled out by the driving of the first drive mechanism.
Inventors:
YAMANAKA TAKUMA (JP)
Application Number:
PCT/JP2020/039540
Publication Date:
April 28, 2022
Filing Date:
October 21, 2020
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/139
Foreign References:
| JP2003023198A | 2003-01-24 | |||
| JP2006073883A | 2006-03-16 | |||
| JP2006269628A | 2006-10-05 | |||
| JP2003051633A | 2003-02-21 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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