LASER CHAMBER, METHOD FOR MANUFACTURING SEALING MEMBER, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

Title:

LASER CHAMBER, METHOD FOR MANUFACTURING SEALING MEMBER, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

Document Type and Number:

WIPO Patent Application WO/2019/207630

Kind Code:

A1

Abstract:

This laser chamber of an excimer laser device is provided with: a container for storing a laser gas internally, the container having a first member and a second member; and a sealing member disposed between two sealing surfaces opposing the first member and the second member, wherein the surface of the laser gas side of the sealing member is constituted by a fluororubber, and the surface of the atmosphere side of the sealing member is constituted by a film that suppresses the permeation of air.

More Like This:

JPH09312429	VIBRATION REMOVER IN LASER MACHINE AND OPTICAL DISK ORIGINAL PLATE MANUFACTURING DEVICE USING THEREOF
JPS60136384	ORTHOGONAL TYPE GAS LASER DEVICE
WO/2019/174158	LASER MODULE AND LASER PROJECTION DEVICE

Inventors:

MIKI MASAHARU (JP)

Application Number:

PCT/JP2018/016491

Publication Date:

October 31, 2019

Filing Date:

April 23, 2018

Export Citation:

Click for automatic bibliography generation Help

Assignee:

GIGAPHOTON INC (JP)

International Classes:

H01S3/02; H01S3/225

Foreign References:

JP2000252554A	2000-09-14
US20140117629A1	2014-05-01
JPH04349676A	1992-12-04
JP2005524998A	2005-08-18
JP2001148526A	2001-05-29
JPH10256625A	1998-09-25
JPH0715056A	1995-01-17
JPH0629160U	1994-04-15
US20050083984A1	2005-04-21
JP2005063986A	2005-03-10

Attorney, Agent or Firm:

HOSAKA Nobuhisa (JP)

Download PDF:

View/Download PDF PDF Help

Previous Patent: METHOD AND DEVICE FOR SPECIFYING VALID OR INVALID FLOW PATH

Next Patent: INFORMATION PROCESSING DEVICE, DETECTION SYSTEM, INFORMATION PROCESSING METHOD, AND INFORMATION PROC...