Title:
LASER CHAMBER
Document Type and Number:
WIPO Patent Application WO/2015/186272
Kind Code:
A1
Abstract:
The present invention improves discharge efficiency. A laser chamber that includes a first space and a second space. The laser chamber may also comprise a first discharge electrode that is arranged inside the first space, a second discharge electrode that is arranged inside the first space so as to face the first discharge electrode, a fan that is arranged inside the first space and that blows a laser gas between the first discharge electrode and the second discharge electrode, and a peaking condenser that is arranged inside the second space.
Inventors:
TSUSHIMA HIROAKI (JP)
KAKIZAKI KOUJI (JP)
MATSUNAGA TAKASHI (JP)
ASAYAMA TAKESHI (JP)
KATSUUMI HISAKAZU (JP)
UMEDA HIROSHI (JP)
IKEDA HIROYUKI (JP)
KAKIZAKI KOUJI (JP)
MATSUNAGA TAKASHI (JP)
ASAYAMA TAKESHI (JP)
KATSUUMI HISAKAZU (JP)
UMEDA HIROSHI (JP)
IKEDA HIROYUKI (JP)
Application Number:
PCT/JP2014/078966
Publication Date:
December 10, 2015
Filing Date:
October 30, 2014
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/038; H01S3/041
Foreign References:
| JPH07111349A | 1995-04-25 | |||
| JPH0388374A | 1991-04-12 | |||
| JPH04307776A | 1992-10-29 | |||
| JPH01273375A | 1989-11-01 |
Attorney, Agent or Firm:
EBISU International Patent Office (JP)
Patent business corporation エビス international patent firm (JP)
Patent business corporation エビス international patent firm (JP)
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