Title:
LASER CLEANING DEVICE AND METHOD FOR REMOVING POLLUTANT FROM MASS SPECTROMETER ELECTRODE
Document Type and Number:
WIPO Patent Application WO/2017/146385
Kind Code:
A1
Abstract:
The present invention relates to a laser cleaning mass spectrometry device and a cleaning method therefor. The laser cleaning mass spectrometry device comprises: a translation stage for two-dimensional scanning; a reflective optical part mounted on the translation stage; a laser light source for emitting a laser cleaning beam at the reflective optical part; and an ion extractor electrode diaphragm having a center hole at the center thereof and laser beam access holes through which the laser cleaning beam travels, and being emitted by the laser cleaning beam reflected from the reflective optical part. The laser cleaning beam is provided to the reflective optical part by passing through the laser beam access hole formed in the ion extractor electrode diaphragm, which is polluted, and the reflected laser cleaning beam is emitted at and cleans the ion extractor electrode diaphragm.
Inventors:
LEE JAE-YONG (KR)
KIM JONG-AHN (KR)
LEE EUN-SEONG (KR)
LEE SANG-WON (KR)
KIM JONG-AHN (KR)
LEE EUN-SEONG (KR)
LEE SANG-WON (KR)
Application Number:
PCT/KR2017/000937
Publication Date:
August 31, 2017
Filing Date:
January 26, 2017
Export Citation:
Assignee:
KOREA RES INST STANDARDS & SCI (KR)
International Classes:
B08B7/00; B08B1/02; H01S3/00
Foreign References:
| US20090200457A1 | 2009-08-13 | |||
| JP2012064523A | 2012-03-29 | |||
| KR101152826B1 | 2012-06-12 | |||
| US20070114438A1 | 2007-05-24 | |||
| JP2010186167A | 2010-08-26 |
Attorney, Agent or Firm:
NURY PATENT LAW FIRM (KR)
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