Title:
LASER CLEANING DEVICE AND LASER CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2018/198427
Kind Code:
A1
Abstract:
This laser cleaning device 100 has: a work stage 12 for holding a component 23A to be cleaned; a heating device for heating the component 23A to be cleaned; a blowing mechanism 3 for blowing a gas 22 onto the surface of the component 23A to be cleaned; a laser beam irradiation unit 1 for irradiating the surface of the component 23A to be cleaned with a laser beam 21; and a movement mechanism 15 which moves, relative to the component 23A to be cleaned, a spot S of the laser beam 21 irradiated onto the surface of the component 23A to be cleaned.
Inventors:
YOKOMURA NOBUO (JP)
KAMIYAMA KOJI (JP)
OGAWA MICHIO (JP)
SASAKI YOHEI (JP)
ENDO RYOSUKE (JP)
KAMIYAMA KOJI (JP)
OGAWA MICHIO (JP)
SASAKI YOHEI (JP)
ENDO RYOSUKE (JP)
Application Number:
PCT/JP2017/045588
Publication Date:
November 01, 2018
Filing Date:
December 19, 2017
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
B08B7/00; B08B5/00
Domestic Patent References:
| WO2013133415A1 | 2013-09-12 |
Foreign References:
| JP2015080865A | 2015-04-27 | |||
| JP2015214065A | 2015-12-03 | |||
| JP2003303799A | 2003-10-24 |
Attorney, Agent or Firm:
SOGA, Michiharu et al. (JP)
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