Title:
LASER CRYSTALLIZATION APPARATUS AND METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2019/054723
Kind Code:
A1
Abstract:
A laser crystallization apparatus is provided. The laser crystallization apparatus comprises: a solid laser light source for emitting a solid laser; a split module for separating the solid laser into a first crystallization layer and a second crystallization laser; a time delay module for emitting the second crystallization laser a predetermined amount of time after the first crystallization laser; and a polarization state control module provided on the laser emission path of the first crystallization layer and/or the second crystallization layer, and controlling the polarization state of the crystallization laser, wherein the first crystallization laser has a higher intensity than the second crystallization laser and can be provided to an object, to be crystallized, a predetermined amount of time before the second crystallization laser.
Inventors:
CHEONG BYOUNG HO (KR)
KANG MIN JIN (KR)
KANG MIN JIN (KR)
Application Number:
PCT/KR2018/010620
Publication Date:
March 21, 2019
Filing Date:
September 11, 2018
Export Citation:
Assignee:
UNIV KOREA RES & BUSINESS FOUNDATION SEJONG CAMPUS (KR)
International Classes:
H01L21/02; H01L21/67
Foreign References:
| JP2016072273A | 2016-05-09 | |||
| JP2003068644A | 2003-03-07 | |||
| JP2006253571A | 2006-09-21 | |||
| JP2008130713A | 2008-06-05 | |||
| KR20070096958A | 2007-10-02 |
Attorney, Agent or Firm:
PARK, Sang Youl (KR)
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