Title:
LASER DEVICE, EUV GENERATION SYSTEM, AND METHOD FOR CONTROLLING LASER DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/002648
Kind Code:
A1
Abstract:
This laser device may contain an optical amplifier that amplifies laser light outputted by a master oscillator, an optical-amplifier power supply that supplies an AC current to said optical amplifier, and a laser controller. The optical-amplifier power supply may contain the following: an AC-current generation circuit that contains an inverter circuit, the output amplitude of which is varied in accordance with a duty cycle, and generates an AC current from the output of said inverter circuit; and a power-supply control circuit that stores control information that defines a correspondence relationship between command values from the abovementioned laser controller and duty cycles for the inverter circuit, uses said control information to determine the duty cycle corresponding to a command value received from the laser controller, and provides the determined duty cycle to the inverter circuit.
Inventors:
KAWASUJI YASUFUMI (JP)
TAKAOKA NAOYA (JP)
YOKOZUKA TOSHIO (JP)
TAKAOKA NAOYA (JP)
YOKOZUKA TOSHIO (JP)
Application Number:
PCT/JP2015/068468
Publication Date:
January 07, 2016
Filing Date:
June 26, 2015
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/134; H01L21/027; H01S3/00; H01S3/097; H01S3/23
Domestic Patent References:
| WO2011013297A1 | 2011-02-03 |
Foreign References:
| JP2012216768A | 2012-11-08 | |||
| JP2004047538A | 2004-02-12 | |||
| JP2013089788A | 2013-05-13 | |||
| JP2003243749A | 2003-08-29 | |||
| JPH01191490A | 1989-08-01 | |||
| JPS62224092A | 1987-10-02 | |||
| JP2006128157A | 2006-05-18 |
Attorney, Agent or Firm:
TOU-OU PATENT FIRM (JP)
Patent business corporation 藤央特許事務所 (JP)
Patent business corporation 藤央特許事務所 (JP)
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