Title:
LASER DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2015/118687
Kind Code:
A1
Abstract:
The laser device in one perspective of the present disclosures may contain: an oscillator that outputs laser light; a slab-shaped light amplifier that amplifies and outputs the laser light output from the oscillator by means of causing same to pass through a slab-shaped light amplification region; and a mirror that is disposed on the light path of the laser light output from the slab-shaped light amplifier or the laser light input to the slab-shaped light amplifier, and that moves in a direction parallel to the laser progression front in the slab-shaped light amplifier. The laser device can correct light path changes in the slab-shaped light amplifier.
Inventors:
KUROSAWA YOSHIAKI (JP)
Application Number:
PCT/JP2014/053059
Publication Date:
August 13, 2015
Filing Date:
February 10, 2014
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/10; H01S3/225
Foreign References:
| JP2010186990A | 2010-08-26 | |||
| JP2013201388A | 2013-10-03 | |||
| JPS574393A | 1982-01-09 | |||
| JPS55142307A | 1980-11-06 | |||
| JP2005205429A | 2005-08-04 | |||
| JPH11179579A | 1999-07-06 |
Attorney, Agent or Firm:
TOU-OU PATENT FIRM (JP)
Patent business corporation 藤央特許事務所 (JP)
Patent business corporation 藤央特許事務所 (JP)
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