Title:
LASER DEVICE, AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2018/055744
Kind Code:
A1
Abstract:
The laser device (200) according to an aspect of the present disclosure is a laser device (200) provided with one or more amplification units (204) for amplifying laser light emitted from a laser oscillator (202), and an amplification controller (218) for controlling the amplification unit (204), wherein: the amplification unit (204) is provided with an incidence-side optical adjustment unit provided with a wavefront adjustment unit (210) for adjusting the wavefront of the laser light and a first direction adjustment unit (212) for adjusting the optical axis of the laser light, an amplifier (214) which amplifies the laser light and which is disposed downstream of the incidence-side optical adjustment unit with respect to the direction of transmission of the laser light, an exit-side optical adjustment unit which is disposed downstream of the amplifier with respect to the direction of transmission of the laser light and which is provided with a second direction adjustment unit (215) for adjusting the optical axis of the laser light, and a measurement unit (216) which is disposed downstream of the exit-side optical adjustment unit with respect to the direction of the laser light and which measures the laser light to acquire information regarding the optical axis, wavefront, and/or energy of the laser light; and the amplification controller (218) controls the incidence-side optical adjustment unit and/or the exit-side optical adjustment unit on the basis of the result of the measurement by the measurement unit (216).
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Inventors:
SUGANUMA TAKASHI (JP)
Application Number:
PCT/JP2016/078074
Publication Date:
March 29, 2018
Filing Date:
September 23, 2016
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H05G2/00; G03F7/20; H01S3/00; H01S3/10
Domestic Patent References:
| WO2015118687A1 | 2015-08-13 | |||
| WO2015111510A1 | 2015-07-30 |
Foreign References:
| JP2013201388A | 2013-10-03 | |||
| JP2012175006A | 2012-09-10 |
Attorney, Agent or Firm:
MATSUURA, Kenzo (JP)
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