Title:
LASER DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/087895
Kind Code:
A1
Abstract:
[Problem] In a laser device in which pulsed laser light emitted from a master oscillator is passed through an optical shutter that opens by a high-voltage pulse being applied thereto, to align the timing of application of the high-voltage pulse with the timing of arrival of the pulsed laser light at the optical shutter.
[Solution] A laser device comprises: a master oscillator (100) which outputs pulsed laser light (L) on the basis of a light-emission trigger signal (S21); a delay circuit (153) which generates a switching signal (S10) after a predetermined delay time from the reception of the light-emission trigger signal (S21); a high-voltage switch (304) which generates a high-voltage pulse on the basis of the switching signal (S10); an optical shutter (32k) which is positioned on an optical path of the pulsed laser light (L), and which is driven on the basis of the high-voltage pulse; and a high-voltage monitor (151) which detects the high-voltage pulse and transmits a high-voltage pulse detection signal (S6) to the delay circuit (153). The delay circuit (153) determines the delay time on the basis of the light-emission trigger signal (S21) and the high-voltage pulse detection signal (S6).
Inventors:
NIWANO MOTOKI (JP)
Application Number:
PCT/JP2016/083595
Publication Date:
May 17, 2018
Filing Date:
November 11, 2016
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/10
Domestic Patent References:
| WO2016142995A1 | 2016-09-15 |
Foreign References:
| JP2013065804A | 2013-04-11 |
Attorney, Agent or Firm:
YANAGIDA, Masashi et al. (JP)
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