Title:
LASER DEVICE, AND MANUFACTURING METHOD FOR ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/183644
Kind Code:
A1
Abstract:
A laser device is provided with: A. an output coupling mirror; B. a grating that constitutes an optical resonator with the output coupling mirror; C. a laser chamber that is disposed on an optical path of the optical resonator; D. at least one prism disposed on the optical path between the laser chamber and the grating; E. a rotary stage including an actuator that rotates the prism such that an incident angle, on the grating, of laser light that is outputted from the laser chamber is changed; F. a wavelength measurement unit that measures the center wavelength of the laser light that is outputted from the laser chamber through the output coupling mirror; G. an angle sensor that detects a rotation angle of the prism; H. a first control unit that controls the actuator with a first operating frequency on the basis of a target wavelength and the measured wavelength; and I. a second control unit that controls the actuator with a second operating frequency the value of which is greater than or equal to the first operating frequency, on the basis of the target wavelength and the detected angle.
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Inventors:
MIYAMOTO HIROTAKA (JP)
YAMANAKA TAKUMA (JP)
IGARASHI MIWA (JP)
YAMANAKA TAKUMA (JP)
IGARASHI MIWA (JP)
Application Number:
PCT/JP2019/010245
Publication Date:
September 17, 2020
Filing Date:
March 13, 2019
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/10
Domestic Patent References:
| WO2018198215A1 | 2018-11-01 |
Foreign References:
| JP2008522439A | 2008-06-26 | |||
| JPH03245583A | 1991-11-01 | |||
| US8624209B1 | 2014-01-07 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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