Title:
LASER DEVICE AND LASER PROCESSING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2018/105082
Kind Code:
A1
Abstract:
A laser device provided with: (A) a solid-state laser device which outputs burst seed pulsed-light including a plurality of pulses; (B) an excimer amplifier which amplifies the burst seed pulsed-light in a discharge space by a single discharge, and outputs amplified burst pulsed-light; (C) an energy sensor which measures an energy of the amplified burst pulsed-light; and (D) a laser control unit which, on the basis of a relationship between a measured value of the energy and a difference between the timing of output of the burst seed pulsed-light from the solid-state laser device and the timing of discharge produced in the discharge space, corrects the timing for causing the solid-state laser device to output the burst seed pulsed-light.
Inventors:
KAKIZAKI KOUJI (JP)
WAKABAYASHI OSAMU (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2016/086572
Publication Date:
June 14, 2018
Filing Date:
December 08, 2016
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/10
Domestic Patent References:
| WO2016121281A1 | 2016-08-04 |
Foreign References:
| JP2009246345A | 2009-10-22 | |||
| JP2009188031A | 2009-08-20 | |||
| JP2013222173A | 2013-10-28 | |||
| JP2016051897A | 2016-04-11 | |||
| JP2014053627A | 2014-03-20 | |||
| JP2012515450A | 2012-07-05 |
Other References:
See also references of EP 3553902A4
Attorney, Agent or Firm:
MATSUURA Kenzo (JP)
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