Title:
LASER DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/047280
Kind Code:
A1
Abstract:
This laser device is provided with: a chamber with a pair of discharge electrodes arranged therein; a gas supplying and exhausting device which supplies a laser gas into the chamber and exhausts the laser gas that is inside the chamber; and a control unit configured to perform a first control which controls the gas supplying and exhausting device to stop laser oscillation and replace the laser gas inside the chamber for each first shot count or for each first elapsed time, and prior to the first control, a second control which controls the gas supplying and exhausting device to stop the laser oscillation and replace the laser gas inside the chamber for each second count, which is fewer than the first shot count, or for each second elapsed time, which is shorter than the first elapsed time.
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Inventors:
ASAYAMA TAKESHI (JP)
MASUDA HIROYUKI (JP)
MASUDA HIROYUKI (JP)
Application Number:
PCT/JP2016/076521
Publication Date:
March 15, 2018
Filing Date:
September 08, 2016
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/036
Domestic Patent References:
| WO2015076415A1 | 2015-05-28 | |||
| WO2006076261A2 | 2006-07-20 |
Foreign References:
| JP2002118309A | 2002-04-19 | |||
| JPH11284251A | 1999-10-15 | |||
| JP2002208746A | 2002-07-26 | |||
| JPH07321389A | 1995-12-08 |
Attorney, Agent or Firm:
HOSAKA Nobuhisa (JP)
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