Title:
LASER DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/105002
Kind Code:
A1
Abstract:
This laser device comprises: a laser chamber containing a pair of electrodes and emitting, at each frequency among a plurality of pulse repeat frequencies, a pulsed laser light having a pulse energy corresponding to a voltage applied between the pair of electrodes; an energy detector provided on the light path of the pulsed laser light, and detecting the pulse energy of the pulsed laser light; a voltage control unit controlling the applied voltage on the basis of a target pulse energy and the pulse energy detected by the energy detector; and a pulse energy control unit periodically varying the target pulse energy at a modulation frequency corresponding to each of the plurality of pulse repeat frequencies with a reference energy serving as the center for the variation.
Inventors:
ASAYAMA TAKESHI (JP)
Application Number:
PCT/JP2016/086057
Publication Date:
June 14, 2018
Filing Date:
December 05, 2016
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/0943; H01S3/225; H01S3/104
Foreign References:
| JP2000021717A | 2000-01-21 | |||
| JPH09107146A | 1997-04-22 | |||
| JP2006088163A | 2006-04-06 | |||
| JPH11191653A | 1999-07-13 |
Attorney, Agent or Firm:
TSUBASA PATENT PROFESSIONAL CORPORATION (JP)
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