Title:
LASER-DRIVING LIGHT SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/212683
Kind Code:
A1
Abstract:
[Problem] To attempt to provide a laser-driving light source device provided with a laser source, and a plasma container on which laser light from the laser source is condensed and made to be incident to generate plasma, wherein excitation light emitted from the plasma container is inhibited from returning to the laser source once again, and the laser source is prevented from being damaged by being heated by the returning excitation light. [Solution] The present invention is characterized in that a filter which blocks the excitation light from the plasma container is disposed between the laser source and a laser light condensing position inside the plasma container.
Inventors:
NOZAKI SHINICHIRO (JP)
YOKOTA TOSHIO (JP)
ASAYAMA JUNYA (JP)
YOKOTA TOSHIO (JP)
ASAYAMA JUNYA (JP)
Application Number:
PCT/JP2017/004685
Publication Date:
December 14, 2017
Filing Date:
February 09, 2017
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
G03F7/20; H01J65/04; H05G2/00
Foreign References:
| JP2008283107A | 2008-11-20 | |||
| JPH04204834A | 1992-07-27 | |||
| JPH11163789A | 1999-06-18 | |||
| JP2013207004A | 2013-10-07 | |||
| JP2010103104A | 2010-05-06 |
Attorney, Agent or Firm:
ISOHATA Masao (JP)
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