Title:
LASER-DRIVING LIGHT SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/212710
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a laser-driving light source device (1) which inhibits a reduction in the processing accuracy of a workpiece and damage due to heat, by preventing laser light (L) which has passed through a plasma container (2) from exiting in conjunction with excitation light (EL) emitted from the plasma container (2). The present invention is characterized in that either: a light beam blocking member (10), which transmits the excitation light (EL) emitted by the plasma container, and blocks the laser light, is disposed on the optical path of the laser light (L) which has passed through the plasma container (2); or a laser generation unit (3) emits annular laser light (L) towards a condensing means (7), the condensing means (7) condenses the annular laser light on the inside of the plasma container (2), and the laser light (La) which has passed through the condensing point of the condensing means (7) exits without hitting a concave reflective surface.
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Inventors:
NOZAKI SHINICHIRO (JP)
MAEZONO YOSHINARI (JP)
YOKOTA TOSHIO (JP)
MAEZONO YOSHINARI (JP)
YOKOTA TOSHIO (JP)
Application Number:
PCT/JP2017/008429
Publication Date:
December 14, 2017
Filing Date:
March 03, 2017
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
H01J65/04
Foreign References:
JP2011119200A | 2011-06-16 | |||
JP2010171159A | 2010-08-05 | |||
JP2009532829A | 2009-09-10 |
Attorney, Agent or Firm:
ISOHATA Masao (JP)
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