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Patent Searching and Data


Title:
LASER EMISSION SYSTEM AND MANUFACTURING METHOD FOR ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/111382
Kind Code:
A1
Abstract:
A laser emission system according to one aspect of this disclosure comprises: a first optical system that converts a first laser beam to a second laser beam; a multi-mirror device that includes a plurality of mirrors, that can control the orientation angle of each of the plurality of mirrors, and that generates a plurality of split laser beams by splitting and reflecting the second laser beam in a plurality of directions; a Fourier transform optical system that condenses the plurality of split laser beams; and a control unit that controls the orientation angles of the plurality of mirrors such that the plurality of laser beams, which were split by the mirrors that are separated from each other by at least the spatial coherence length of the second laser beam, are caused to overlap by the Fourier transform optical system.

Inventors:
SUZUKI AKIYOSHI (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
JP2017/044040
Publication Date:
June 13, 2019
Filing Date:
December 07, 2017
Export Citation:
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Assignee:
GIGAPHOTON INC (Postcode3238558, JP)
International Classes:
H01S3/086
Domestic Patent References:
WO2016147308A12016-09-22
WO2014208754A12014-12-31
WO2016051518A12016-04-07
Foreign References:
JP2009018335A2009-01-29
US20010045419A12001-11-29
JP2006231366A2006-09-07
JPS6384788A1988-04-15
US20020008091A12002-01-24
Attorney, Agent or Firm:
MATSUURA, Kenzo (Matsuura & Associates, P.O. Box 176 Shinjuku Sumitomo Bldg. 23F, 6-1, Nishi-shinjuku 2-chome, Shinjuku-k, Tokyo 23, 〒1630223, JP)
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