Title:
LASER ENERGY MEASURING DEVICE, AND LASER ENERGY MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/026600
Kind Code:
A1
Abstract:
Provided is a laser energy measuring device with which it is possible for a laser beam that is being radiated onto a substrate to be evaluated accurately. This laser energy measuring device is provided, inside or outside an illuminating optical system, with: a first beam splitter which reflects a laser beam by means of either one of P-polarized reflection or S-polarized reflection; a second beam splitter which subjects first reflected light reflected by the first beam splitter to the other of P-polarized reflection and S-polarized reflection; a first measuring unit which measures the energy of second reflected light reflected by the second beam splitter; and a second measuring unit which measures the energy of transmitted light that has been transmitted through the second beam splitter.
More Like This:
| JPS60100613 | [Title of the device] Ignition time sensor |
| WO/2016/002499 | THERMAL INFRARED SENSOR AND GAS MEASUREMENT DEVICE |
Inventors:
MIZUMURA MICHINOBU (JP)
Application Number:
PCT/JP2019/023234
Publication Date:
February 06, 2020
Filing Date:
June 12, 2019
Export Citation:
Assignee:
V TECH CO LTD (JP)
International Classes:
G01J1/02; G01J4/04; H01L21/20; H01L21/268; H01S3/00
Domestic Patent References:
| WO2014208754A1 | 2014-12-31 |
Foreign References:
| DE102014226818A1 | 2016-06-23 | |||
| JPS5958885A | 1984-04-04 | |||
| JPS60261183A | 1985-12-24 | |||
| JP2007214189A | 2007-08-23 | |||
| JP2005214752A | 2005-08-11 | |||
| JP2007033187A | 2007-02-08 |
Attorney, Agent or Firm:
SHIRASAKA & PATENT PARTNERS (JP)
Download PDF:
Previous Patent: METHOD FOR PRODUCING EPOXY ALKANE, AND SOLID OXIDATION CATALYST
Next Patent: DC POWER SUPPLY CIRCUIT
Next Patent: DC POWER SUPPLY CIRCUIT