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Patent Searching and Data


Title:
LASER GAS MANAGEMENT SYSTEM, ELECTRON DEVICE MANUFACTURING METHOD, AND EXCIMER LASER SYSTEM CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2019/186651
Kind Code:
A1
Abstract:
This laser gas management system includes: a gas regeneration device which is connected to multiple excimer laser devices, regenerates, as regenerated gas, a laser gas discharged from the multiple excimer laser devices, and supplies the regenerated gas to the multiple excimer laser devices; and a control unit which determines whether or not at least one parameter of each of the multiple excimer laser devices has gone beyond a predefined range, and if the number of excimer laser devices in which at least one parameter has exceeded the predefined range is greater than or equal to 2, determines that the gas regeneration device is abnormal.

Inventors:
TSUSHIMA Hiroaki (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
SUZUKI Natsushi (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
WAKABAYASHI Osamu (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
Application Number:
JP2018/012162
Publication Date:
October 03, 2019
Filing Date:
March 26, 2018
Export Citation:
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Assignee:
GIGAPHOTON INC. (400 Oaza Yokokurashinden, Oyama-shi Tochigi, 58, 〒3238558, JP)
International Classes:
H01S3/036; G03F7/20; H01S3/00; H01S3/225; H01S3/23
Domestic Patent References:
WO2017081819A12017-05-18
WO2015076415A12015-05-28
Foreign References:
US20170063016A12017-03-02
JP2016076544A2016-05-12
US20060193997A12006-08-31
JP2001239275A2001-09-04
JPH05347443A1993-12-27
Attorney, Agent or Firm:
HOSAKA Nobuhisa (ARAI, HASHIMOTO HOSAKA & ASSOCIATES, KANDA SK BLDG. 4F, 3-22, KANDA SAKUMA-CHO, CHIYODA-K, Tokyo 25, 〒1010025, JP)
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