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Title:
LASER GAS REGENERATION DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/207821
Kind Code:
A1
Abstract:
This laser gas regeneration device regenerates an exhaust gas exhausted from at least one ArF excimer laser device that is connected to a first laser gas supply source which supplies a first laser gas containing argon gas, neon gas, and xenon gas in a first concentration, and to a second laser gas supply source which supplies a second laser gas containing argon gas, neon gas, and fluorine gas, and the laser gas regeneration device supplies the regenerated gas to the at least one ArF excimer laser gas device. The laser gas regeneration device comprises: a data acquisition unit that acquires data on the supply amount of the second laser gas that is supplied to the at least one ArF excimer laser device; a xenon addition unit that adds to the regenerated gas a third laser gas containing argon gas, neon gas, and xenon gas at a second concentration which is higher than the first concentration; and a control unit that controls, on the basis of the supply amount, the amount to be added of the third laser gas by the xenon addition unit.

Inventors:
TSUSHIMA Hiroaki (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
TANAKA Satoshi (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
FUJIMAKI Yousuke (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
ASAYAMA Takeshi (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
WAKABAYASHI Osamu (400 Oaza Yokokurashinden, Oyama-sh, Tochigi 58, 〒3238558, JP)
Application Number:
JP2018/039236
Publication Date:
October 31, 2019
Filing Date:
October 22, 2018
Export Citation:
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Assignee:
GIGAPHOTON INC. (400 Oaza Yokokurashinden, Oyama-shi Tochigi, 58, 〒3238558, JP)
International Classes:
H01S3/225
Domestic Patent References:
WO2017072863A12017-05-04
WO2015075840A12015-05-28
WO2017081819A12017-05-18
Foreign References:
JP2002270935A2002-09-20
JP2001111142A2001-04-20
JPH06177461A1994-06-24
JPH0997951A1997-04-08
US9478934B12016-10-25
US20060193997A12006-08-31
Attorney, Agent or Firm:
HOSAKA Nobuhisa (ARAI, HASHIMOTO HOSAKA & ASSOCIATES, KANDA SK BLDG. 4F, 3-22, KANDA SAKUMA-CHO, CHIYODA-K, Tokyo 25, 〒1010025, JP)
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