LASER ION SOURCE

WIPO Patent Application WO/2012/057107

A1

Provided is a laser ion source which generates ions by the illumination of a laser beam, comprising: an evacuated container (110); an illumination box (120) which is positioned within the container (110) and wherein a target (121), which emits ions by illumination with the laser beam, is housed; an ion beam extraction unit (112) which electrostatically withdraws ions from the illumination box (120) and conducts the ions outside the container (110) as an ion beam; a valve (140) disposed on an ion beam extraction part of the container (110), which opens when the ion beam exits and is otherwise closed; and a shutter (150) disposed between the valve (140) and the illumination box (120), which opens intermittently when the ion beam exits and is otherwise closed. Microscopic particles emitted when the laser beam is illuminated are thus trapped within the container (110), and the discharge of said microscopic particles to an evacuation assembly or to downstream devices which are connected to the ion source is alleviated.

HAYASHI KAZUO (JP)
KAKUTANI AKIKO (JP)
OSANAI AKIHIRO (JP)
SATO KIYOKAZU (JP)
KURUSU TSUTOMU (JP)
YOSHIYUKI TAKESHI (JP)

PCT/JP2011/074493

May 03, 2012

October 25, 2011

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TOSHIBA KK (JP)
HAYASHI KAZUO (JP)
KAKUTANI AKIKO (JP)
OSANAI AKIHIRO (JP)
SATO KIYOKAZU (JP)
KURUSU TSUTOMU (JP)
YOSHIYUKI TAKESHI (JP)

H01J27/24; H01J37/08

JP2009037764A	2009-02-19
JP3713524B2	2005-11-09
JPH01154448A	1989-06-16
JPH02273440A	1990-11-07
JP2010080159A	2010-04-08
JPH0613199A	1994-01-21
JP2005235697A	2005-09-02
JP2001076635A	2001-03-23
JPS6321735A	1988-01-29

KURATA, Masatoshi et al. (JP)
Masatoshi Kurata (JP)

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