Title:
LASER IRRADIATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/042808
Kind Code:
A1
Abstract:
In a laser irradiating device 1 according to one mode of the invention, each of first and second flotation units 30a, 30b has a base 31 and a porous plate 32 joined to the upper surface of the base 31 via an adhesive layer 34. The base 31 has, on at least an external peripheral edge thereof facing a gap, a raised portion 312 protruding upward. The porous plate 32 has a cut-out portion 321 mating with the raised portion 312. The adhesive layer 34 is formed along an inner wall of the raised portion 312 that has been mated with the cut-out portion 321.
Inventors:
SUZUKI YUKI (JP)
Application Number:
PCT/JP2017/021216
Publication Date:
March 08, 2018
Filing Date:
June 07, 2017
Export Citation:
Assignee:
JAPAN STEEL WORKS LTD (JP)
International Classes:
H01L21/268; B65G49/06; H01L21/20; H01L21/677
Domestic Patent References:
| WO2013136411A1 | 2013-09-19 |
Foreign References:
| JP2009135430A | 2009-06-18 | |||
| JP2009194370A | 2009-08-27 | |||
| JP2002231654A | 2002-08-16 | |||
| JP5512052B2 | 2014-06-04 | |||
| JP2008110852A | 2008-05-15 | |||
| JP2013251524A | 2013-12-12 | |||
| JP2009161283A | 2009-07-23 | |||
| JP2011225355A | 2011-11-10 | |||
| JP2006135083A | 2006-05-25 | |||
| JP2009117552A | 2009-05-28 | |||
| JP2006327715A | 2006-12-07 |
Attorney, Agent or Firm:
IEIRI Takeshi (JP)
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