Title:
LASER IRRADIATION DEVICE AND LASER LIFT OFF DEVICE USING SAME
Document Type and Number:
WIPO Patent Application WO/2018/074105
Kind Code:
A1
Abstract:
A laser irradiation device is provided with transparent first and second rotating plates 4A, 4B which are disposed at inclinations at opposite angles to each other on an optical path for a laser beam array 3 formed from a plurality of laser beams progressing in parallel within the same plane, and rotate at the same angular velocity in directions opposite to each other centered on the optical axis of the optical path. The laser spots of the laser beam array 3 are shifted in the direction of the array.
Inventors:
KAJIYAMA KOICHI (JP)
OGAWA YOSHINORI (JP)
EBIZUKA AKIHIRO (JP)
OGAWA YOSHINORI (JP)
EBIZUKA AKIHIRO (JP)
Application Number:
PCT/JP2017/032913
Publication Date:
April 26, 2018
Filing Date:
September 12, 2017
Export Citation:
Assignee:
V TECH CO LTD (JP)
International Classes:
B23K26/064; B23K26/351; H01L21/268; H01S3/00; H01S3/101
Foreign References:
| JP2004283873A | 2004-10-14 | |||
| US20140217073A1 | 2014-08-07 | |||
| JP2015089565A | 2015-05-11 | |||
| JPH0669928U | 1994-09-30 |
Attorney, Agent or Firm:
OGAWA, Moriaki et al. (JP)
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