Title:
LASER LIFT-OFF METHOD AND LASER LIFT-OFF APPARATUS
Document Type and Number:
WIPO Patent Application WO/2012/011202
Kind Code:
A1
Abstract:
The present invention is capable of peeling, from a substrate, a material layer formed on the substrate without generating cracks in the material layer. In order to peel the material layer from the substrate at an interface between the substrate (1) and the material layer (2), pulsed laser light (L) is applied, through the substrate (1), to a work (3) having the material layer (2) formed on the substrate (1), while constantly changing the irradiation region with respect to the work (3), in such a manner that the adjacent irradiation regions overlap each other on the work (3). The region where the pulsed laser light (L) is applied to the work (3) is set to satisfy the relationship of S/L≤0.125, where S (mm2) is the area of the irradiation region, and L (mm) is the circumferential length of the irradiation region. Consequently, the material layer can be reliably peeled from the substrate without generating cracks in the material layer formed on the substrate.
Inventors:
MATSUDA Ryozo (Motoishikawa-choAoba-ku,Yokohama-sh, Kanagawa 04, 〒2250004, JP)
松田 僚三 (〒04 神奈川県横浜市青葉区元石川町６４０９番地ウシオ電機株式会社内 Kanagawa, 〒2250004, JP)
NARUMI Keiji (Motoishikawa-choAoba-ku,Yokohama-sh, Kanagawa 04, 〒2250004, JP)
鳴海 恵司 (〒04 神奈川県横浜市青葉区元石川町６４０９番地ウシオ電機株式会社内 Kanagawa, 〒2250004, JP)
TANAKA Kazuya (Motoishikawa-choAoba-ku,Yokohama-sh, Kanagawa 04, 〒2250004, JP)
松田 僚三 (〒04 神奈川県横浜市青葉区元石川町６４０９番地ウシオ電機株式会社内 Kanagawa, 〒2250004, JP)
NARUMI Keiji (Motoishikawa-choAoba-ku,Yokohama-sh, Kanagawa 04, 〒2250004, JP)
鳴海 恵司 (〒04 神奈川県横浜市青葉区元石川町６４０９番地ウシオ電機株式会社内 Kanagawa, 〒2250004, JP)
TANAKA Kazuya (Motoishikawa-choAoba-ku,Yokohama-sh, Kanagawa 04, 〒2250004, JP)
Application Number:
JP2010/066792
Publication Date:
January 26, 2012
Filing Date:
September 28, 2010
Export Citation:
Assignee:
USHIO DENKI KABUSHIKI KAISHA (2-6-1, Ote-machiChiyoda-k, Tokyo 50, 〒1008150, JP)
ウシオ電機株式会社 (〒50 東京都千代田区大手町二丁目６番１号 Tokyo, 〒1008150, JP)
MATSUDA Ryozo (Motoishikawa-choAoba-ku,Yokohama-sh, Kanagawa 04, 〒2250004, JP)
松田 僚三 (〒04 神奈川県横浜市青葉区元石川町６４０９番地ウシオ電機株式会社内 Kanagawa, 〒2250004, JP)
NARUMI Keiji (Motoishikawa-choAoba-ku,Yokohama-sh, Kanagawa 04, 〒2250004, JP)
鳴海 恵司 (〒04 神奈川県横浜市青葉区元石川町６４０９番地ウシオ電機株式会社内 Kanagawa, 〒2250004, JP)
ウシオ電機株式会社 (〒50 東京都千代田区大手町二丁目６番１号 Tokyo, 〒1008150, JP)
MATSUDA Ryozo (Motoishikawa-choAoba-ku,Yokohama-sh, Kanagawa 04, 〒2250004, JP)
松田 僚三 (〒04 神奈川県横浜市青葉区元石川町６４０９番地ウシオ電機株式会社内 Kanagawa, 〒2250004, JP)
NARUMI Keiji (Motoishikawa-choAoba-ku,Yokohama-sh, Kanagawa 04, 〒2250004, JP)
鳴海 恵司 (〒04 神奈川県横浜市青葉区元石川町６４０９番地ウシオ電機株式会社内 Kanagawa, 〒2250004, JP)
International Classes:
H01L21/02; H01L21/20; H01L21/268
Attorney, Agent or Firm:
NAGASAWA Shunichirou (Room 4A, Kisuna Bldg.23-3, Nishi-nippori 4-chome, Arakawa-k, Tokyo 13, 〒1160013, JP)
Claims:
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