Title:
LASER LIGHT IRRADIATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/074253
Kind Code:
A1
Abstract:
This laser light irradiating device is provided with: a spatial optical modulator which, in accordance with a phase pattern, modulates laser light output from a laser light source and emits the modulated laser light; an objective lens which condenses, toward a target object, the laser light emitted from the spatial optical modulator; a converging lens which is disposed in the optical path of the laser light, between the spatial optical modulator and the objective lens, and which causes the laser light to converge; and a slit member which is disposed in the optical path of the laser light at the position of a focal point after the converging lens, to block a portion of the laser light. The phase pattern includes a first pattern for modulating a portion of the laser light incident on a pupil plane of the objective lens, and a second pattern for modulating the remaining portion of the laser light. The second pattern includes a diffraction grating pattern for causing the remaining portion of the laser light to branch into a plurality of diffracted light beams, and the slit member blocks the diffracted light beams by means of a slit.
Inventors:
OKUMA JUNJI (JP)
Application Number:
PCT/JP2017/036362
Publication Date:
April 26, 2018
Filing Date:
October 05, 2017
Export Citation:
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
B23K26/064; B23K26/067; C03B33/09; G02B5/18; H01L21/677
Foreign References:
| JP2013521131A | 2013-06-10 | |||
| JP2011031284A | 2011-02-17 | |||
| JP2012501853A | 2012-01-26 | |||
| JP2014059511A | 2014-04-03 | |||
| JP2017131945A | 2017-08-03 |
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
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